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5N CF4
Material Specification Sheet
Prepared to U.S. OSHA, CMA, ANSI, Canadian WHMIS, GBT Standards and EC Standards
| Purity Specifications |
| Product Name and Description: |
Tetrafluroromethane |
| Chemical Formula: |
CF4 |
| Safety Information: |
Refer to MSDS AL 116 |
|
Description |
Chemical Formula |
CF4 |
Chemical Purity |
|
99.999%* |
Nitrogen |
N2 |
5 ppm |
Oxygen |
O2 |
1 ppm |
Carbon Dioxide |
CO2 |
0.5 ppm |
Carbon Monoxide |
CO |
0.5 ppm |
Water |
H2O |
1 ppm |
Sulfur Hexafluoride |
SF6 |
1 ppm |
Acidity ( HF ) |
|
0.1 ppm |
THC ( as Methane ) |
|
1 ppm |
Maximum contaminants |
Cylinder Package |
044L high pressure cylinders filled to 70 lbs each with 660CGA valve |
 
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