The interior process chamber of BECO's Yield Enhancement Process Tanks are fabricated from a single piece of sheet material. The sheet is precision machined, and then in the Japanese "origami" method, folded into the form of a tank. This unique approach minimizes welding, and provides smooth, seamless, rounded interior corners void of traps, and leaks due to poor workmanship, thermal cycling, and chemical contact.
The tank includes weir containment for chemistry recirculation. Ports for fill and recirculation on the Yield Enhancement Tanks are located on opposing sides near the bottom providing optimum processing recirculation flow, An optional perforated diffuser plate provides for an even laminar flow through the chemical processing tank to help improve process uniformity. All plumbing connections are longflare types unless otherwise specified.
Tanks can be fitted with product/ carrier locating "furniture" that is welded into the tank to prevent the particle traps that are associated with "drop in" or temporary style furniture.
BECO Yield Enhancement Tanks can be supplied with any available megasonic, or can be prepared for the megasonic of your choice.
Shown Above: The tank's interior is fabricated from a single, precision machined and folded sheet of plastic. This minimizes welds, and provides smoth rounded interior corners.
Please refer to our Tank Ordering Worksheet for part numbers and ordering information.

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BECO's Yield Enhancement Quickdump Rinse Tanks are fabricated with the same "origami" style techniques as used in the Process Tanks. A single piece of sheet material is precision machined and folded to result in smooth, rounded interior corners. This provides the rinse tanks with the same construction quality benefits, and for rinsing applications, the smooth corners also improve rinsing dynamics which reduces rinsing time and water consumption.
All of the BECO Quickdump Tanks are equipped with spray manifolds that assist in preventing particle reattachment, and rinse the interior of the tank during the dumping function. The cone pattern spray nozzles are staggered from side to side and are positioned high above the tank to provide the best coverage. BECO's optional articulatd spray manifolds and nozzle covers ensure robot clearance when necessary, and minimize operator strain where manual wafer transfer baths is required. The articulated nozzle covers prevent chemical "drag out" from dripping on the spray nozzles and being deposited on the clean, rinsed wafers during the spray cycle. All the plumbing connections are longflare types unless otherwise specified.
Tanks can be fitted with product/ carrier locating "furniture" that is welded into the tank to prevent the particle traps that are associated with "drop in" or temporary style furniture.
BECO Quickdump Tanks can also be supplied with any available megasonic, or can be prepared for the megasonic of your choice.

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